Vol. 1, Issue 2, 2004April 01, 2004 EDT
Planarization and Dielectric Properties of Thin Photosensitive and Nonphotosensitive BCB
Planarization and Dielectric Properties of Thin Photosensitive and Nonphotosensitive BCB
Dusch, Brian, and Paul A. Kohl. 2004. “Planarization and Dielectric Properties of Thin Photosensitive and Nonphotosensitive BCB.” Journal of Microelectronics and Electronic Packaging 1 (2): 47–52. https://doi.org/10.4071/1551-4897-1.2.47.