Spiral Inductors with Multi-Strip Coils Processed on Sapphire and Bulk Silicon Substrates

Päivi H. Karjalainen; Juha Rapelo; Eero O. Ristolainen

doi:10.4071/1551-4897-1.4.206

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Karjalainen, Päivi H., Juha Rapelo, and Eero O. Ristolainen. 2004. “Spiral Inductors with Multi-Strip Coils Processed on Sapphire and Bulk Silicon Substrates.” Journal of Microelectronics and Electronic Packaging 1 (4): 206–16. https://doi.org/10.4071/1551-4897-1.4.206.

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