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Vol. 11, Issue 1, 2014
January 01, 2014 EDT
Redistribution Layers (RDLs) for 2.5D/3D IC Integration
J. Lau
,
P. Tzeng
,
C. Lee
,
C. Zhan
,
M. Li
,
J. Cline
,
K. Saito
,
Y. Hsin
,
P. Chang
,
Y. Chang
,
J. Chen
,
S. Chen
,
C. Wu
,
H. Chang
,
C. Chien
,
C. Lin
,
T. Ku
,
R. Lo
,
M. Kao
,
3D IC integration
through-silicon via (TSV)
redistribution layer (RDL)
polymer
Cu damascene
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ccby-nc-nd-4.0
•
https://doi.org/10.4071/imaps.406
Journal of Microelectronics & Elect Pkg
Lau, J., P. Tzeng, C. Lee, C. Zhan, M. Li, J. Cline, K. Saito, et al. 2014. “Redistribution Layers (RDLs) for 2.5D/3D IC Integration.”
Journal of Microelectronics and Electronic Packaging
11 (1): 16–24.
https://doi.org/10.4071/imaps.406
.
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