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Vol. 11, Issue 1, 2014January 01, 2014 EDT

Redistribution Layers (RDLs) for 2.5D/3D IC Integration

J. Lau, P. Tzeng, C. Lee, C. Zhan, M. Li, J. Cline, K. Saito, Y. Hsin, P. Chang, Y. Chang, J. Chen, S. Chen, C. Wu, H. Chang, C. Chien, C. Lin, T. Ku, R. Lo, M. Kao,
3D IC integrationthrough-silicon via (TSV)redistribution layer (RDL)polymerCu damascene
Copyright Logoccby-nc-nd-4.0 • https://doi.org/10.4071/imaps.406
Journal of Microelectronics & Elect Pkg
Lau, J., P. Tzeng, C. Lee, C. Zhan, M. Li, J. Cline, K. Saito, et al. 2014. “Redistribution Layers (RDLs) for 2.5D/3D IC Integration.” Journal of Microelectronics and Electronic Packaging 11 (1): 16–24. https:/​/​doi.org/​10.4071/​imaps.406.
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