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Vol. 10, Issue 4, 2013October 01, 2013 EDT

Reliability Investigations up to 350°C of Gate Oxide Capacitors Realized in a Silicon-on-Insulator CMOS Technology

K. Grella, S. Dreiner, H. Vogt, U. Paschen,
Oxide reliabilitysilicon-on-insulator (SOI)time-dependent dielectric breakdown (TDDB)
Copyright Logoccby-nc-nd-4.0 • https://doi.org/10.4071/imaps.391
Journal of Microelectronics & Elect Pkg
Grella, K., S. Dreiner, H. Vogt, and U. Paschen. 2013. “Reliability Investigations up to 350°C of Gate Oxide Capacitors Realized in a Silicon-on-Insulator CMOS Technology.” Journal of Microelectronics and Electronic Packaging 10 (4): 150–54. https:/​/​doi.org/​10.4071/​imaps.391.
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