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Vol. 12, Issue 1, 2015January 01, 2015 EDT

A Resealable, Gas-Tight Packaging Technique for Silicon Microfluidic Devices

Lilla Safford Smith, Gordon D. Hoople, Jim C. Cheng, Albert P. Pisano,
Hermetic bondingmicrofluidic packagingcoolingelectronics coolingmicroloop heat pipe
Copyright Logoccby-nc-nd-4.0 • https://doi.org/10.4071/imaps.444
Journal of Microelectronics & Elect Pkg
Smith, Lilla Safford, Gordon D. Hoople, Jim C. Cheng, and Albert P. Pisano. 2015. “A Resealable, Gas-Tight Packaging Technique for Silicon Microfluidic Devices.” Journal of Microelectronics and Electronic Packaging 12 (1): 49–54. https:/​/​doi.org/​10.4071/​imaps.444.
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