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Vol. 12, Issue 3, 2015July 01, 2015 EDT

Warpage Evaluation of High-Temperature Sandwich-Structured Power Module for SiC Power Semiconductor Devices

Takeshi Anzai, Yoshinori Murakami, Shinji Sato, Hidekazu Tanisawa, Kohei Hiyama, Hiroki Takahashi, Fumiki Kato, Hiroshi Sato,
SiChigh temperaturewarpagepower moduleSi3N4 substratebaseplate
Copyright Logoccby-nc-nd-4.0 • https://doi.org/10.4071/imaps.464
Journal of Microelectronics & Elect Pkg
Anzai, Takeshi, Yoshinori Murakami, Shinji Sato, Hidekazu Tanisawa, Kohei Hiyama, Hiroki Takahashi, Fumiki Kato, and Hiroshi Sato. 2015. “Warpage Evaluation of High-Temperature Sandwich-Structured Power Module for SiC Power Semiconductor Devices.” Journal of Microelectronics and Electronic Packaging 12 (3): 153–60. https:/​/​doi.org/​10.4071/​imaps.464.
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