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Vol. 13, Issue 3, 2016July 01, 2016 EDT

Design and Demonstration of Fine-Pitch and High-Speed Redistribution Layers for Panel-Based Glass Interposers at 40-μm Bump Pitch

Brett Sawyer, Yuya Suzuki, Zihan Wu, Hao Lu, Venky Sundaram, Kadappan Panayappan, Rao Tummala,
2.5-D interposerexcimer laser ablationglass interposerredistribution layersemiadditive process
Copyright Logoccby-nc-nd-4.0 • https://doi.org/10.4071/imaps.504
Journal of Microelectronics & Elect Pkg
Sawyer, Brett, Yuya Suzuki, Zihan Wu, Hao Lu, Venky Sundaram, Kadappan Panayappan, and Rao Tummala. 2016. “Design and Demonstration of Fine-Pitch and High-Speed Redistribution Layers for Panel-Based Glass Interposers at 40-Μm Bump Pitch.” Journal of Microelectronics and Electronic Packaging 13 (3): 128–35. https:/​/​doi.org/​10.4071/​imaps.504.
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