Thermodynamic Analysis of Physical Vapor Deposited Inorganic Thin Films on Low Temperature Cofired Ceramic

Carol Putman; Rachel Cramm Horn; J. Ambrose Wolf; Daniel Krueger

doi:10.4071/imaps.518

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Putman, Carol, Rachel Cramm Horn, J. Ambrose Wolf, and Daniel Krueger. 2016. “Thermodynamic Analysis of Physical Vapor Deposited Inorganic Thin Films on Low Temperature Cofired Ceramic.” Journal of Microelectronics and Electronic Packaging 13 (3): 95–101. https://doi.org/10.4071/imaps.518.

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