Vol. 13, Issue 4, 2016October 01, 2016 EDT
Toward Integrated Pressure Sensors for Temperatures up to 600°C
Toward Integrated Pressure Sensors for Temperatures up to 600°C
Maralani, Ayden, Levent Beker, and Albert P. Pisano. 2016. “Toward Integrated Pressure Sensors for Temperatures up to 600°C.” Journal of Microelectronics and Electronic Packaging 13 (4): 163–68. https://doi.org/10.4071/imaps.522.