Vol. 8, Issue 3, 2011July 01, 2011 EDT
Analysis, Design, and Optimization of Thermal In-Plane Microactuator—Chevron Type
Analysis, Design, and Optimization of Thermal In-Plane Microactuator—Chevron Type
Puneeth, K.B., and K.N. Seetharamu. 2011. “Analysis, Design, and Optimization of Thermal In-Plane Microactuator—Chevron Type.” Journal of Microelectronics and Electronic Packaging 8 (3): 102–9. https://doi.org/10.4071/imaps.0296.