LTCC Based Microfluidic Mass Flow Sensor Concept

Christian Zeilmann; Thomas Haas; Andreas Backes; Ulrich Schmid

doi:10.4071/imaps.331

Loading [Contrib]/a11y/accessibility-menu.js

Zeilmann, Christian, Thomas Haas, Andreas Backes, and Ulrich Schmid. 2012. “LTCC Based Microfluidic Mass Flow Sensor Concept.” Journal of Microelectronics and Electronic Packaging 9 (2): 87–96. https://doi.org/10.4071/imaps.331.

View more stats