Vol. 7, Issue 2, 2010April 01, 2010 EDT
Thermomechanical Stresses in Copper Films at Elevated Temperature
Thermomechanical Stresses in Copper Films at Elevated Temperature
Lederer, Martin, Javad Zarbakhsh, Rui Huang, Thomas Detzel, and Brigitte Weiss. 2010. “Thermomechanical Stresses in Copper Films at Elevated Temperature.” Journal of Microelectronics and Electronic Packaging 7 (2): 99–104. https://doi.org/10.4071/1551-4897-7.2.99.