Vol. 7, Issue 1, 2010January 01, 2010 EDT
Design and Fabrication of MEMS Micropumps using Double Sided Etching
Design and Fabrication of MEMS Micropumps using Double Sided Etching
Yunas, Jumril, Juliana Johari, A.A Hamzah, Mimiwaty Mimiwaty, Ille C. Gebeshuber, and Burhanuddin Yeop Majlis. 2010. “Design and Fabrication of MEMS Micropumps Using Double Sided Etching.” Journal of Microelectronics and Electronic Packaging 7 (1): 44–47. https://doi.org/10.4071/1551-4897-7.1.44.