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Vol. 7, Issue 1, 2010
January 01, 2010 EDT
Critical Issues of TSV and 3D IC Integration
John H. Lau
,
3D IC integration
TSV with RDL
solder microbumps
MEOL
thin wafer handling
thermal management
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https://doi.org/10.4071/1551-4897-7.1.35
Journal of Microelectronics & Elect Pkg
Lau, John H. 2010. “Critical Issues of TSV and 3D IC Integration.”
Journal of Microelectronics and Electronic Packaging
7 (1): 35–43.
https://doi.org/10.4071/1551-4897-7.1.35
.
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