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Vol. 7, Issue 1, 2010January 01, 2010 EDT

Critical Issues of TSV and 3D IC Integration

John H. Lau,
3D IC integrationTSV with RDLsolder microbumpsMEOLthin wafer handlingthermal management
Copyright Logoccby-nc-nd-4.0 • https://doi.org/10.4071/1551-4897-7.1.35
Journal of Microelectronics & Elect Pkg
Lau, John H. 2010. “Critical Issues of TSV and 3D IC Integration.” Journal of Microelectronics and Electronic Packaging 7 (1): 35–43. https:/​/​doi.org/​10.4071/​1551-4897-7.1.35.
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