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Vol. 7, Issue 1, 2010January 01, 2010 EDT

Design and Process of 3D MEMS System-in-Package (SiP)

John H. Lau,
MEMSTSVSiP3D IC integrationlow-temperature bondingwafer-level packaging
Copyright Logoccby-nc-nd-4.0 • https://doi.org/10.4071/1551-4897-7.1.10
Journal of Microelectronics & Elect Pkg
Lau, John H. 2010. “Design and Process of 3D MEMS System-in-Package (SiP).” Journal of Microelectronics and Electronic Packaging 7 (1): 10–15. https:/​/​doi.org/​10.4071/​1551-4897-7.1.10.
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