Electromagnetically Actuated Membrane-Based Micropumps with Integrated Magnetic Yoke

Thomas Lederer; Martin Heinisch; Wolfgang Hilber; Bernhard Jakoby

doi:10.4071/1551-4897-6.4.205

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Lederer, Thomas, Martin Heinisch, Wolfgang Hilber, and Bernhard Jakoby. 2009. “Electromagnetically Actuated Membrane-Based Micropumps with Integrated Magnetic Yoke.” Journal of Microelectronics and Electronic Packaging 6 (4): 205–10. https://doi.org/10.4071/1551-4897-6.4.205.

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