Vol. 6, Issue 4, 2009October 01, 2009 EDT
Batch Fabrication of Shape Memory Actuated Polymer Microvalves by Transfer Bonding Techniques
Batch Fabrication of Shape Memory Actuated Polymer Microvalves by Transfer Bonding Techniques
Grund, T., C. Megnin, J. Barth, and M. Kohl. 2009. “Batch Fabrication of Shape Memory Actuated Polymer Microvalves by Transfer Bonding Techniques.” Journal of Microelectronics and Electronic Packaging 6 (4): 219–27. https://doi.org/10.4071/1551-4897-6.4.219.