Microactuators for Fluidic Applications: Principles, Devices, and Systems

Adamovic, Nadja, Ioanna Giouroudi, Jovan Matovic, Zoran Djinovic, and Ulrich Schmid. 2009. “Microactuators for Fluidic Applications: Principles, Devices, and Systems.” Journal of Microelectronics and Electronic Packaging 6 (4): 250–64. https://doi.org/10.4071/1551-4897-6.4.250.