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Vol. 6, Issue 4, 2009October 01, 2009 EDT

Ferrofluid-Piston Based Micropump and Electromagnetic Actuation in LTCC Technology—First Results

I. Atassi, C. Atzlesberger, P. Fulmek, J. Nicolics, W. Smetana,
Microfluidic pump designprototype fabricationhigh-ampacity coilembedded ferritic tapesmagnetic field FE-analysis
Copyright Logoccby-nc-nd-4.0 • https://doi.org/10.4071/1551-4897-6.4.228
Journal of Microelectronics & Elect Pkg
Atassi, I., C. Atzlesberger, P. Fulmek, J. Nicolics, and W. Smetana. 2009. “Ferrofluid-Piston Based Micropump and Electromagnetic Actuation in LTCC Technology—First Results.” Journal of Microelectronics and Electronic Packaging 6 (4): 228–39. https:/​/​doi.org/​10.4071/​1551-4897-6.4.228.
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