Ferrofluid-Piston Based Micropump and Electromagnetic Actuation in LTCC Technology—First Results

I. Atassi; C. Atzlesberger; P. Fulmek; J. Nicolics; W. Smetana

doi:10.4071/1551-4897-6.4.228

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Atassi, I., C. Atzlesberger, P. Fulmek, J. Nicolics, and W. Smetana. 2009. “Ferrofluid-Piston Based Micropump and Electromagnetic Actuation in LTCC Technology—First Results.” Journal of Microelectronics and Electronic Packaging 6 (4): 228–39. https://doi.org/10.4071/1551-4897-6.4.228.

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