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Vol. 6, Issue 3, 2009July 01, 2009 EDT

Technology and Application of 3D Shaped LTCC Modules for Pressure Sensors and Microsystems

Stanislav Slosarčík, Igor Vehec, Alexander Gmiterko, Pavol Cabúk, Michal Jurčišin,
LTCC (low temperature cofired ceramics)pressure sensorthick-film technology3D shaped module
Copyright Logoccby-nc-nd-4.0 • https://doi.org/10.4071/1551-4897-6.3.158
Journal of Microelectronics & Elect Pkg
Slosarčík, Stanislav, Igor Vehec, Alexander Gmiterko, Pavol Cabúk, and Michal Jurčišin. 2009. “Technology and Application of 3D Shaped LTCC Modules for Pressure Sensors and Microsystems.” Journal of Microelectronics and Electronic Packaging 6 (3): 158–63. https:/​/​doi.org/​10.4071/​1551-4897-6.3.158.
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