Mixed LTCC and LTTT Technology for Microplasma Generator Fabrication

Roberto K. Yamamoto; Mário R. Gongora-Rubio; Rodrigo S. Pessoa; Márcio R. Cunha; Homero S. Maciel

doi:10.4071/1551-4897-6.2.101

Yamamoto, Roberto K., Mário R. Gongora-Rubio, Rodrigo S. Pessoa, Márcio R. Cunha, and Homero S. Maciel. 2009. “Mixed LTCC and LTTT Technology for Microplasma Generator Fabrication.” Journal of Microelectronics and Electronic Packaging 6 (2): 101–7. https://doi.org/10.4071/1551-4897-6.2.101.

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