Vol. 6, Issue 1, 2009January 01, 2009 EDT
Silicon on Ceramics—A New Integration Concept for Silicon Devices to LTCC
Silicon on Ceramics—A New Integration Concept for Silicon Devices to LTCC
Fischer, M., H. Bartsch de Torres, B. Pawlowski, R. Gade, S. Barth, M. Mach, M. Stubenrauch, M. Hoffmann, and J. Müler. 2009. “Silicon on Ceramics—A New Integration Concept for Silicon Devices to LTCC.” Journal of Microelectronics and Electronic Packaging 6 (1): 1–5. https://doi.org/10.4071/1551-4897-6.1.1.