Hermetic Package for Optical MEMS

F. Seigneur; Y. Fournier; T. Maeder; P. Ryser; J. Jacot

doi:10.4071/1551-4897-6.1.32

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Seigneur, F., Y. Fournier, T. Maeder, P. Ryser, and J. Jacot. 2009. “Hermetic Package for Optical MEMS.” Journal of Microelectronics and Electronic Packaging 6 (1): 32–37. https://doi.org/10.4071/1551-4897-6.1.32.

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