Thick Film Accelerometers in LTCC Technology—Design Optimization, Fabrication, and Characterization

Holger Neubert; Uwe Partsch; Daniel Fleischer; Mathias Gruchow; Alfred Kamusella; The-Quan Pham

doi:10.4071/1551-4897-5.4.150

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Neubert, Holger, Uwe Partsch, Daniel Fleischer, Mathias Gruchow, Alfred Kamusella, and The-Quan Pham. 2008. “Thick Film Accelerometers in LTCC Technology—Design Optimization, Fabrication, and Characterization.” Journal of Microelectronics and Electronic Packaging 5 (4): 150–55. https://doi.org/10.4071/1551-4897-5.4.150.

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