Vol. 5, Issue 4, 2008October 01, 2008 EDT
Thick Film Accelerometers in LTCC Technology—Design Optimization, Fabrication, and Characterization
Thick Film Accelerometers in LTCC Technology—Design Optimization, Fabrication, and Characterization
Neubert, Holger, Uwe Partsch, Daniel Fleischer, Mathias Gruchow, Alfred Kamusella, and The-Quan Pham. 2008. “Thick Film Accelerometers in LTCC Technology—Design Optimization, Fabrication, and Characterization.” Journal of Microelectronics and Electronic Packaging 5 (4): 150–55. https://doi.org/10.4071/1551-4897-5.4.150.