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Journal of Microelectronics & Elect Pkg
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ISSN 1551-4897
General
Vol. 5, Issue 3, 2008July 01, 2008 EDT

Packaging MEMS Die on E-Glass Substrates

M. Black, H. Boyett, N. Sanders, J. Weller, R. Dean, R.W. Johnson, M. Kranz,
COTSlaminateMEMSpackaging
Copyright Logoccby-nc-nd-4.0 • https://doi.org/10.4071/1551-4897-5.3.122
Journal of Microelectronics & Elect Pkg
Black, M., H. Boyett, N. Sanders, J. Weller, R. Dean, R.W. Johnson, and M. Kranz. 2008. “Packaging MEMS Die on E-Glass Substrates.” Journal of Microelectronics and Electronic Packaging 5 (3): 122–25. https:/​/​doi.org/​10.4071/​1551-4897-5.3.122.

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