New Sacrificial Layer-Based Screen-Printing Process for Free-Standing Thick-Films Applied to MEMS

Claude Lucat; Patrick Ginet; Francis Ménil

doi:10.4071/1551-4897-4.3.86

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Lucat, Claude, Patrick Ginet, and Francis Ménil. 2007. “New Sacrificial Layer-Based Screen-Printing Process for Free-Standing Thick-Films Applied to MEMS.” Journal of Microelectronics and Electronic Packaging 4 (3): 86–92. https://doi.org/10.4071/1551-4897-4.3.86.

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