Vol. 4, Issue 3, 2007July 01, 2007 EDT
New Sacrificial Layer-Based Screen-Printing Process for Free-Standing Thick-Films Applied to MEMS
New Sacrificial Layer-Based Screen-Printing Process for Free-Standing Thick-Films Applied to MEMS
Lucat, Claude, Patrick Ginet, and Francis Ménil. 2007. “New Sacrificial Layer-Based Screen-Printing Process for Free-Standing Thick-Films Applied to MEMS.” Journal of Microelectronics and Electronic Packaging 4 (3): 86–92. https://doi.org/10.4071/1551-4897-4.3.86.