Three-dimensional fluidic microsystem fabricated in Low Temperature Cofired Ceramic Technology

Leszek J. Golonka; Tomasz Zawada; Henryk Roguszczak; Karol Malecha; Michal Chudy; Dorota Stadnik; Artur Dybko

doi:10.4071/1551-4897-3.3.145

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Golonka, Leszek J., Tomasz Zawada, Henryk Roguszczak, Karol Malecha, Michal Chudy, Dorota Stadnik, and Artur Dybko. 2006. “Three-Dimensional Fluidic Microsystem Fabricated in Low Temperature Cofired Ceramic Technology.” Journal of Microelectronics and Electronic Packaging 3 (3): 145–51. https://doi.org/10.4071/1551-4897-3.3.145.

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