Development of Biocompatible MEMS Wireless Capacitive Pressure Sensor

Shankaran Janardhanan; Joan. Z. Delalic; Jeffrey Catchmark; Dharanipal Saini

doi:10.4071/1551-4897-2.4.287

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Janardhanan, Shankaran, Joan. Z. Delalic, Jeffrey Catchmark, and Dharanipal Saini. 2005. “Development of Biocompatible MEMS Wireless Capacitive Pressure Sensor.” Journal of Microelectronics and Electronic Packaging 2 (4): 287–96. https://doi.org/10.4071/1551-4897-2.4.287.

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