Vol. 3, Issue 4, 2006October 01, 2006 EDT
Fabrication and Testing of a Micromirror Device Actuated by PZT Thin Films
Fabrication and Testing of a Micromirror Device Actuated by PZT Thin Films
Xiao, Z.M., B.J. Chen, and H. Fan. 2006. “Fabrication and Testing of a Micromirror Device Actuated by PZT Thin Films.” Journal of Microelectronics and Electronic Packaging 3 (4): 209–15. https://doi.org/10.4071/1551-4897-3.4.209.