Novel Technology Options for Multilayer-Based Ceramic Microsystems

Partsch, Uwe, Adrian Goldberg, Martin Ihle, Gunter Hagen, and D. Arndt. 2011. “Novel Technology Options for Multilayer-Based Ceramic Microsystems.” Journal of Microelectronics and Electronic Packaging 8 (3): 95–101. https:/​/​doi.org/​10.4071/​imaps.292.