Novel Technology Options for Multilayer-Based Ceramic Microsystems

Uwe Partsch; Adrian Goldberg; Martin Ihle; Gunter Hagen; D. Arndt

doi:10.4071/imaps.292

Partsch, Uwe, Adrian Goldberg, Martin Ihle, Gunter Hagen, and D. Arndt. 2011. “Novel Technology Options for Multilayer-Based Ceramic Microsystems.” Journal of Microelectronics and Electronic Packaging 8 (3): 95–101. https://doi.org/10.4071/imaps.292.

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