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ISSN 1551-4897
General
Vol. 7, Issue 3, 2010July 01, 2010 EDT

ZoneBOND Thin Wafer Support Process for Wafer Bonding Applications

Jeremy McCutcheon, Robert Brown, JoElle Dachsteiner,
Silicon wafer bondingtemporary wafer bondingthin wafer supportthrough silicon viaTSV
Copyright Logoccby-nc-nd-4.0 • https://doi.org/10.4071/imaps.269

Articles in Vol. 7, Issue 3, 2010

Vol. 7, Issue 3, 2010
  • Integration of Electrografted Layers for the Metallization of Deep TSVs
    F. RaynalV. MevellecN. FrederichD. SuhrI. BispoB. CouturierC. Truzzi
  • Fabrication and Electrical Evaluation of Via Last Polymer Liner TSVs
    Deniz S. TezcanBivragh MajeedYann CivalePhilippe SoussanEric Beyne
  • Evaluation of Cu/Sn-Cu Bump Bonding Processes for 3D Integration Using a Fluxing Adhesive
    Alan HuffmanChristopher GregoryMatthew LueckJason ReedDorota TempleRuss Stapleton
  • Assembly Process Development for Fine Pitch Flip Chip Silicon-to-Silicon 3D Wafer Level Integration with No Flow Underfill
    Zhaozhi LiSangil LeeBrian J. LewisPaul N. HoustonDaniel F. BaldwinEugene A. StoutTheodore G. TessierJohn L. Evans
  • Advances in WLCSP Technologies to Enable Cost Reduction
    R. ChilukuriR. AndersonB. RogersA. Syed
  • Wafer Level Packaging of Compound Semiconductors
    Andrew StrandjordThorsten TeutschAxel SchefflerBernd OttoAnna PaatOscar AlinabonJing Li
  • Improved Heat Dissipation and Optical Performance of High-Power LED Packaging with Sintered Nanosilver Die-Attach Material
    Paul PanaccioneTao WangXu ChenSusan LuoGuo-Quan Lu
  • Development of MEMS Power Sensor Package
    Bruce C. KimRahim Kasim
  • Next Generation System in a Package Manufacturing by Embedded Chip Technologies
    Lars BoettcherD. ManessisS. KaraszkiewiczA. OstmannH. Reichl
  • ZoneBOND Thin Wafer Support Process for Wafer Bonding Applications
    Jeremy McCutcheonRobert BrownJoElle Dachsteiner
  • A Robust Thin-Film Wafer-Level Packaging Approach for MEMS Devices
    Krishnan SeetharamanBart van VelzenJohannes van WingerdenHans van ZadelhoffCadmus YuanFrank RietveldCoen TakJoost van BeekPeter H.C. MagnéeHerman C.W. Beijerinck
Journal of Microelectronics & Elect Pkg
McCutcheon, Jeremy, Robert Brown, and JoElle Dachsteiner. 2010. “ZoneBOND Thin Wafer Support Process for Wafer Bonding Applications.” Journal of Microelectronics and Electronic Packaging 7 (3): 138–42. https://doi.org/10.4071/imaps.269.
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