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Vol. 3, Issue 3, 2006July 01, 2006 EDT

LTCC Microsystems and Microsystem Packaging and Integration Applications

K.A. Peterson, K.D. Patel, C.K. Ho, B.R. Rohrer, C.D. Nordquist, B.D. Wroblewski, K.B. Pfeifer,
LTCCmicrosystemsacrificialchannelmicrofluidicpressure sensortube
Copyright Logoccby-nc-nd-4.0 • https://doi.org/10.4071/1551-4897-3.3.109
Journal of Microelectronics & Elect Pkg
Peterson, K.A., K.D. Patel, C.K. Ho, B.R. Rohrer, C.D. Nordquist, B.D. Wroblewski, and K.B. Pfeifer. 2006. “LTCC Microsystems and Microsystem Packaging and Integration Applications.” Journal of Microelectronics and Electronic Packaging 3 (3): 109–20. https:/​/​doi.org/​10.4071/​1551-4897-3.3.109.
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