A Capacitive Pressure Sensor Based on Cofirable Ceramic/Glass Materials with LTCC Technology

Yue Liu; Yuanxun Li; Yongcheng Lu; Hua Su; Zhihua Tao; Mingzhou Chen; Daming Chen

doi:10.4071/imaps.926920

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Liu, Yue, Yuanxun Li, Yongcheng Lu, Hua Su, Zhihua Tao, Mingzhou Chen, and Daming Chen. 2019. “A Capacitive Pressure Sensor Based on Cofirable Ceramic/Glass Materials with LTCC Technology.” Journal of Microelectronics and Electronic Packaging 16 (3): 149–56. https://doi.org/10.4071/imaps.926920.

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