Vol. 16, Issue 3, 2019July 01, 2019 EDT
A Capacitive Pressure Sensor Based on Cofirable Ceramic/Glass Materials with LTCC Technology
A Capacitive Pressure Sensor Based on Cofirable Ceramic/Glass Materials with LTCC Technology
Liu, Yue, Yuanxun Li, Yongcheng Lu, Hua Su, Zhihua Tao, Mingzhou Chen, and Daming Chen. 2019. “A Capacitive Pressure Sensor Based on Cofirable Ceramic/Glass Materials with LTCC Technology.” Journal of Microelectronics and Electronic Packaging 16 (3): 149–56. https://doi.org/10.4071/imaps.926920.