Radio Frequency Microelectromechanical System-Platform Based on Silicon-Ceramic Composite Substrates

M. Fischer; S. Gropp; J. Nowak; B. Capraro; R. Sommer; M. Hoffmann; J. Müller

doi:10.4071/imaps.442

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Fischer, M., S. Gropp, J. Nowak, B. Capraro, R. Sommer, M. Hoffmann, and J. Müller. 2015. “Radio Frequency Microelectromechanical System-Platform Based on Silicon-Ceramic Composite Substrates.” Journal of Microelectronics and Electronic Packaging 12 (1): 37–42. https://doi.org/10.4071/imaps.442.

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