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Vol. 3, Issue 4, 2006October 01, 2006 EDT

MEMS Technologies and Devices for Single-Chip RF Front-Ends

Clark T.-C. Nguyen,
single-chipMEMSmicromechanicalquality factorresonatortunable capacitorinductorRF MEMS switchfilterwireless communicationsmechanical circuit
Copyright Logoccby-nc-nd-4.0 • https://doi.org/10.4071/1551-4897-3.4.160
Journal of Microelectronics & Elect Pkg
Nguyen, Clark T.-C. 2006. “MEMS Technologies and Devices for Single-Chip RF Front-Ends.” Journal of Microelectronics and Electronic Packaging 3 (4): 160–68. https:/​/​doi.org/​10.4071/​1551-4897-3.4.160.
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