Vol. 7, Issue 1, 2010January 01, 2010 EDT
Helmholtz Resonance Based Micro Electrostatic Actuators for Compressible Gas Control: A Microjet Generator and a Gas Micro Pump
Helmholtz Resonance Based Micro Electrostatic Actuators for Compressible Gas Control: A Microjet Generator and a Gas Micro Pump
Kim, Hanseup, Khalil Najafi, and Luis P. Bernal. 2010. “Helmholtz Resonance Based Micro Electrostatic Actuators for Compressible Gas Control: A Microjet Generator and a Gas Micro Pump.” Journal of Microelectronics and Electronic Packaging 7 (1): 1–9. https://doi.org/10.4071/1551-4897-7.1.1.