Helmholtz Resonance Based Micro Electrostatic Actuators for Compressible Gas Control: A Microjet Generator and a Gas Micro Pump

Hanseup Kim; Khalil Najafi; Luis P. Bernal

doi:10.4071/1551-4897-7.1.1

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Kim, Hanseup, Khalil Najafi, and Luis P. Bernal. 2010. “Helmholtz Resonance Based Micro Electrostatic Actuators for Compressible Gas Control: A Microjet Generator and a Gas Micro Pump.” Journal of Microelectronics and Electronic Packaging 7 (1): 1–9. https://doi.org/10.4071/1551-4897-7.1.1.

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